MEMS and NEMS : Systems, Devices and Structures /
Lyshevski, Sergey Edward.
MEMS and NEMS : Systems, Devices and Structures / Sergey Edward Lyshevski. - Boca Raton : CRC Press, 2002. - 461 s. : il. ; 24 cm. - (Nano- and Microscience, Engineering, Technology, and Medicine Series) .
bibliogr.
0849312620
621.38
MEMS and NEMS : Systems, Devices and Structures / Sergey Edward Lyshevski. - Boca Raton : CRC Press, 2002. - 461 s. : il. ; 24 cm. - (Nano- and Microscience, Engineering, Technology, and Medicine Series) .
bibliogr.
0849312620
621.38