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Tehnologia mikroshem /

Parfenov, Oleg Dmitrievic.

Tehnologia mikroshem / Oleg Dmitrievic Parfenov. - Moskva : Vyssaa skola, 1986. - 318 s. : il. ; 22 cm.

bibliogr.

Uniwersalna Klasyfikacja Dziesiętna: 621.38

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