Lyshevski, Sergey Edward. <br/><br/>
MEMS and NEMS :  Systems, Devices and Structures / 
Sergey Edward Lyshevski. 
 - Boca Raton :  CRC Press,  2002. 
 - 461 s. :  il. ;  24 cm. 
 - (Nano- and Microscience, Engineering, Technology, and Medicine Series) .
<br/><br/>bibliogr. 
<br/><br/><label>ISBN: </label>0849312620 
<br/><br/><label>Uniwersalna Klasyfikacja Dziesiętna: </label> 621.38