000 00698cam a2200241 i 4500
001 pc01014835k
008 010518s1994 00 eng
020 _a3540539255
935 _a0014-83560
040 _aCZEST 2/OOZ/LSz
041 0 _aeng
080 _a621.375.826:535.3:621.38
100 1 _aMetev, Simeon M.
245 1 0 _aLaser-Assisted Microtechnology /
_cSimeon M. Metev, Vadim P. Veiko.
260 _aBerlin :
_bSpringer-Verlag,
_c1994.
300 _a240 s. :
_bil. ;
_c24 cm.
440 0 _a(Springer Series in Materials Science)
_vvol. 19
700 1 _aVeiko, Vadim P.
920 _a3-540-53925-5
998 _aTECHNIKA LASEROWA
998 _aLASERY
942 _2z
_cZ
999 _c14744
_d14744