000 00696cam a2200229 i 4500
001 pc03021081k
008 030614s1987 00 eng
020 _a3540179518
935 _a0021-08160
040 _aCZEST 2/OOZ/CK
041 0 _aeng
080 _a621.375.826:535.3
100 1 _aBoyd, Ian W.
245 1 0 _aLaser Processing of Thin Films and Microstructures :
_bOxidation, Deposition and Etching of Insulators /
_cIan W. Boyd.
260 _aBerlin :
_bSpringer-Verlag,
_c1987.
300 _aVIII, 320 s. :
_bil. ;
_c24 cm.
440 0 _a(Springer Series in Materials Science)
_vVol. 3
504 _abibliogr.
920 _a3-540-17951-8
998 _aLASERY
942 _2z
_cZ
999 _c20949
_d20949