000 | 00696cam a2200229 i 4500 | ||
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001 | pc03021081k | ||
008 | 030614s1987 00 eng | ||
020 | _a3540179518 | ||
935 | _a0021-08160 | ||
040 | _aCZEST 2/OOZ/CK | ||
041 | 0 | _aeng | |
080 | _a621.375.826:535.3 | ||
100 | 1 | _aBoyd, Ian W. | |
245 | 1 | 0 |
_aLaser Processing of Thin Films and Microstructures : _bOxidation, Deposition and Etching of Insulators / _cIan W. Boyd. |
260 |
_aBerlin : _bSpringer-Verlag, _c1987. |
||
300 |
_aVIII, 320 s. : _bil. ; _c24 cm. |
||
440 | 0 |
_a(Springer Series in Materials Science) _vVol. 3 |
|
504 | _abibliogr. | ||
920 | _a3-540-17951-8 | ||
998 | _aLASERY | ||
942 |
_2z _cZ |
||
999 |
_c20949 _d20949 |