| 000 | 00600cam a2200217 i 4500 | ||
|---|---|---|---|
| 001 | pc03021676k | ||
| 008 | 030730s1998 00 eng | ||
| 020 | _a3854372043 | ||
| 935 | _a0021-67660 | ||
| 040 | _aCZEST 2/OOZ/LSz | ||
| 041 | 0 | _aeng | |
| 080 | _a621.315.5:621.382 | ||
| 100 | 1 | _aKirchauer, Heinrich. | |
| 245 | 1 | 0 |
_aPhotolithography Simulation / _cHeinrich Kirchauer. |
| 260 |
_aWien : _bOsterreichischer Kunst-und Kulturverlag, _c1998. |
||
| 300 |
_a221 s : _bil. ; _c30 cm. |
||
| 504 | _abibliogr. | ||
| 920 | _a3-85437-204-3 | ||
| 998 | _aPÓŁPRZEWODNIKI | ||
| 942 |
_2z _cZ |
||
| 999 |
_c21534 _d21534 |
||