| 000 | 00787cam a2200253 i 4500 | ||
|---|---|---|---|
| 001 | pc05027074k | ||
| 008 | 050411s2002 00 eng | ||
| 020 | _a0849312620 | ||
| 935 | _a0027-07460 | ||
| 040 | _aCZEST 2/OOZ/LSz | ||
| 041 | 0 | _aeng | |
| 080 | _a621.38 | ||
| 100 | 1 | _aLyshevski, Sergey Edward. | |
| 245 | 1 | 0 |
_aMEMS and NEMS : _bSystems, Devices and Structures / _cSergey Edward Lyshevski. |
| 260 |
_aBoca Raton : _bCRC Press, _c2002. |
||
| 300 |
_a461 s. : _bil. ; _c24 cm. |
||
| 440 | 0 | _a(Nano- and Microscience, Engineering, Technology, and Medicine Series) | |
| 504 | _abibliogr. | ||
| 920 | _a0-8493-1262-0 | ||
| 998 | _aUKÅADY MIKROELEKTRONICZNE | ||
| 998 | _aMIKROELEKTRONIKA | ||
| 998 | _aSYSTEMY MIKROELEKTROMECHANICZNE | ||
| 942 |
_2z _cZ |
||
| 999 |
_c26844 _d26844 |
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