| 000 | 00711cam a2200241 i 4500 | ||
|---|---|---|---|
| 001 | pc19055469k | ||
| 008 | 070509s1987 00 rus | ||
| 935 | _a0055-46960 | ||
| 040 | _aCZEST 2/OOZ/KC | ||
| 041 | 1 |
_arus _heng |
|
| 080 | _a621.3.049.77:533.9 | ||
| 245 | 1 | 0 |
_aPlazmennaa tehnologia v proizvodstve SBIS / _cpod red. N. Ajnspruka i D. Brauna ; [tł. z ang.]. |
| 260 |
_aMoskva : _bMir, _c1987. |
||
| 300 |
_a466 s. : _bil. ; _c21 cm. |
||
| 504 | _abibliogr. | ||
| 700 | 1 |
_aAjnspruk, N. _eRed. |
|
| 700 | 1 |
_aBraun, D. _eRed. |
|
| 700 | 1 |
_aEinspruch, Norman G. _eRed. |
|
| 700 | 1 |
_aBrown, Dale M. _eRed. |
|
| 998 | _aMIKROELEKTRONIKA | ||
| 998 | _aOBRÓBKA PLAZMOWA | ||
| 942 |
_2z _cWM |
||
| 999 |
_c54340 _d54340 |
||